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Get Advanced scanning microscopy for nanotechnology techniques PDF

By Weilie Zhou

ISBN-10: 0387333258

ISBN-13: 9780387333250

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2. How It Works? EBSD operates by arranging a flat, highly polished (or as-deposited thin film) sample at a shallow angle, usually 20˚, to the incident electron beam (Fig. 7) (since the SEM stage is often used to tilt the plane of the sample to this shallow angle, the value of stage tilt is often referred to and is typically 70˚). With an 2. 7. Schematic arrangement of sample orientation in the SEM. ) accelerating voltage of 10–30 kV, and incident beam currents of 1–50 nA, electron diffraction occurs from the incident beam point on the sample surface.

With the beam at a given point on the sample, a signal is recorded and interpreted as the brightness in the output image. However, EBSD gives rise to a 3D pattern emanating from a point that is recorded in 2D on the phosphor screen.

In most SEMs that use this lens arrangement, both the upper and lower detector can be used simultaneously, because the total budget of SE is fixed by the operating conditions and by the sample, if 80% of the SE signal is going to the TTL detector then only 20% at most is available for the in-chamber ET detector. However, at longer WDs the ability to utilize both detectors can often be of great value. For example, the TTL detector is very sensitive to sample charging effects, but the in-chamber ET detector is relatively insensitive because of the large contribution to its signal from SE3 and BSEs, so mixing the two detector outputs can suppress charging artifacts while maintaining image detail.

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Advanced scanning microscopy for nanotechnology techniques and applications by Weilie Zhou

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